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SIMULATION-BASED OPTIMIZATION FOR GROUPS OF CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING USING SIMULATED ANNEALING

机译：基于模拟退火的半导体制造中集群工具组的优化

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S. Jain; R. R. Creasey; J. Himmelspach; K. P. White; M. Fu; Tobias Uhlig; Oliver Rose;
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年度 2014
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1. SIMULATION-BASED OPTIMIZATION FOR GROUPS OF CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING USING SIMULATED ANNEALING [J] . Tobias Uhlig, Oliver Rose Proceedings of the Workshop on Principles of Advanced and Distributed Simulation . 2011,第CDaROM期

机译：基于模拟退火的半导体制造中集群工具组的优化
2. SIMULATION-BASED OPTIMIZATION USING SIMULATED ANNEALING FOR OPTIMAL EQUIPMENT SELECTION WITHIN PRINT PRODUCTION ENVIRONMENTS [J] . Sudhendu Rai, Ranjit Kumar Ettam Proceedings of the Workshop on Principles of Advanced and Distributed Simulation . 2013,第CDaROM1期

机译：在印刷生产环境中使用模拟退火进行基于模拟的优化选择设备
3. ENHANCEMENT OF SIMULATION-BASED SEMICONDUCTOR MANUFACTURING FORECAST QUALITY THROUGH HYBRID TOOL DOWN TIME MODELING [J] . Patrick Preuss, Andre Naumann, Wolfgang Scholl, Proceedings of the Workshop on Principles of Advanced and Distributed Simulation . 2014,第CDaROM1期

机译：通过基于混合工具停机时间建模的基于仿真的半导体制造来预测质量的增强
4. A SIMULATION-BASED ANALYSIS OF THE CYCLE TIME OF CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING [C] . Heiko Niedermayer, Oliver Rose Simulation in Industry . 2003

机译：基于仿真的半导体制造中集群工具的循环时间分析
5. Optimization of flexible manufacturing system buffer with a bottleneck activity using simulated annealing and genetic algorithm. [D] . Stapleton, Larry Everett. 2001

机译：使用模拟退火和遗传算法优化具有瓶颈活动的柔性制造系统缓冲区。
6. Optimization of a Stochastically Simulated Gene Network Model via Simulated Annealing [O] . Jonathan Tomshine, Yiannis N. Kaznessis 2006

机译：通过模拟退火优化随机模拟基因网络模型
7. SIMULATION-BASED OPTIMIZATION USING SIMULATED ANNEALING FOR OPTIMAL EQUIPMENT SELECTION WITHIN PRINT PRODUCTION ENVIRONMENTS [O] . M. E. Kuhl, Sudhendu Rai, Ranjit Kumar Ettam 2015

机译：基于模拟退火的模拟退火算法在印刷生产环境下的最优设备选择

SIMULATION-BASED OPTIMIZATION FOR GROUPS OF CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING USING SIMULATED ANNEALING

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